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水晶振動子を用いたワイドレンジ荷重センサによる
マルチ生体信号計測
○学室崎裕一正新井史人
名古屋大学大学院工学研究科マイクロ・ナノシステム工学専攻
f : Frequency shift
P
Wide-measurement-range load sensors are
desirable in many fields
f =
Fq
P
A
Fq : Force applied to QCR
Sensor sensitivity
Where
Retention A
mechanism
0.3 mN
Stiffness
(Sensor output)
S0 : Stress sensitivity (Constant)

S0

Fq
P
P : Force applied to sensor
 : Area of cross section
 : Transmission efficiency
of force
0.12 mN
60 N

0.06 mN
31 N

10-6
Preloading is needed
150 N

Frequency
[MHz]
Background
10-3
1
Measurement force [N]
16.155
16.150
16.145
0
10
Load [N]
10
Load [N]
Miniaturization is difficult
Result of loading test
Fabricated sensor
Frequency [MHz]
15.7650
Silicon
5 mm
Wiring
16.160
Preloading
Experiment
Bonding area
Quartz Crystal
16.165
0
103
Compact sensor is desired
Concept: Packaging
16.156
16.152
16.148
16.144
16.140
16.136
15.7600
15.7550
15.7500
y = 0.000347 x + 15.745859
R² = 0.998225
15.7450
15.7400
0
Theoretical Maximum load : 130 N
10
20
30
Load [N]
40
50
Detection of biosignals
Quartz Crystal
(a) Cr/Au sputtering
Silicon
(e) Photoresist (OFPR) pattering
(b) Sheet resist laminating
(f) Etching Si (DRIE)
(c) Sheet resist patterning
(g) Photoresist (SU-8 )patterning
(d) Etching Quartz Crystal
(Sand blasting)
(h) Etching Silicon (DRIE)
Frequency [MHz]
Parts breakdown of packaged force sensor
15.7490
15.7485
15.7480
15.7475
15.7470
15.7465
15.7460
15.7455
15.7450
Held breath
~3500 Hz
Lay down
0
10
20 Time [s] 30
40
50
Frequency [MHz]
15.7461
(i) Packaging
Reference
15.7457
20
25
30
35
Time [s]
40
45
50
Conclusions
0.8
max : 45 [MPa]
15.7458
15
1.0
1/n
140
120
100
80
60
40
20
0
[MPa]
15.7459
15.7456
Fabrication process of force sensor
10 N
15.7460
0.5
0.3
0.0
0
5
10
15
Number of leaf springs
20
• Sensor volume was reduced from 226 mm2 to 24.6 mm2 (Volume ratio 1/10)
• The sensitivity of fabricated sensor was 347 Hz/N (theoretical maximum load is 130 N).
• Multiple biological signals (respiration, heartbeat, and posture) were detected in the bed.
 Yuichi Murozaki, et al, “Multiple Biosignals Detection by Wide-range Load Sensor Using Quartz Crystal Resonator”, 1P1X03, Robomech2014
Contact person： Yuichi Murozaki
E-mail: [email protected],
URL: http://www.biorobotics.mech.nagoya-u.ac.jp/
TEL: 052-789-5026, FAX : 052-789-5027
Acknowledgements：
本研究はJST(A-STEP)および独立行政法人科学技術
振興機構ＣＯＩプログラムの支援をうけて行われたもので
す．