イオン注入に立脚した難加工性材料の超精密剥離技術の開発
ឡ⥲◊࣭◊✲ሗ࿌ 愛総研・研究報告 ➨ 16 号 2014 ྕ 2014 年 ᖺ 第 19 ࢜ࣥὀධ❧⬮ࡋࡓ㞴ຍᕤᛶᮦᩱࡢ㉸⢭ᐦ㞳ᢏ⾡ࡢ㛤Ⓨ Development of Ultra-Precision Exfoliation Technology for Hard-to-Process Materials ᒾ⏣ ༤அ͊ Hiroyuki Iwata͊ Abstract Hydrogen ion-implantation into Hard-to-Process Materials and subsequent heat treatment causes dome-shaped gas-filled blisters and craters appear on the surface. This method becomes an attractive nano fabrication technology having high accuracy and high environment-friendly process. We newly tried for this technique to metal materials, such as titanium and aluminum-ally, and a CFRP composit material. When the same conditions as a semiconductor crystal were used, in the aluminum Magnesium alloy, the separation phenomenon was able to be found out on the surface. The existence of the crystalline phase considered to have formed by the rolling has leaded exfoliation. 1䠊 ⥴ゝ ᮏᏛࡀᡤᅾࡍࡿᆅᇦࡣࠊࡶࡢ࡙ࡃࡾ⏘ᴗࠊ≉⮬ື㌴ࠊ ⾡ࡢ᭱㐺ࢆ㏣✲ࡍࡿࡇࡶ㔜せ࡛࠶ࡿࠋࡲࡓࠊᅛయ⾲㠃 ⯟✵ᶵࠊᕤసᶵᲔࡢୡ⏺ⓗ࡞⏘ᴗ㞟✚ᆅ࡛࠶ࡿ㸬 ᖺ ࡢࢼࣀ࣭࣐ࢡࣟᵓ㐀ࡣ⏺㠃⌧㇟ࡁ࡞ᙳ㡪ࢆ࠼ࡿࡇ ྡྂᒇ࡛ &23㸦⏕≀ከᵝᛶ᮲⣙➨ ᅇ⥾⣙ᅜ㆟㸧 ࡀ▱ࡽࢀ࡚࠸ࡿࡀࠊ⏕⏘ຍᕤࡢศ㔝࡛ࡢ⏝ࡣ⥴ᑵ࠸ ࡀ㛤ദࡉࢀࠊࡑࡢ୰࡛⎔ቃ㈇Ⲵ㍍ῶࠊ&2 ๐ῶࡢ୰࡛〇ရ ࡓࡤࡾ࡛࠶ࡿࠋᚑ᮶࡞࠸⢭ᗘࡢຍᕤᡭἲ࡞ࡽࡧᕤල ࡢ㍍㔞ࠊ㧗ᛶ⬟ࡀᙉࡃồࡵࡽࢀࡓࠋ ᨵⰋ࠾ࡼࡧ⿕ຍᕤᮦᩱᅛయᵓ㐀〇ᶵ⬟ࢆ࠼ࡿࡇ ⮬ື㌴⏘ᴗ࡛ࡣࠊ ᖺᗘ᪂⇞㈝ᇶ‽ࡢᑐᛂࡀࡁ ࡛ࠊ㣕㌍ⓗ࡞⏕⏘⬟⋡ࠊ〇ရ⢭ᗘࡀᚓࡽࢀࡿࠋࢼࣀ࣭࣐ ࡞ㄢ㢟࡞ࡗ࡚࠾ࡾࠊ㌴య㔜㔞ࡢ㍍㔞ࢆᙉຊ᥎㐍ࡍࡿ ࢡࣟຍᕤ࠾࠸࡚ࡣ༢⤖ᬗࢆࡣࡌࡵࡍࡿ㞴ຍᕤᛶᕤල ᚲせࡀ࠶ࡾࠊ㧗ᙉᗘ㗰ᑐࡍࡿప㈇Ⲵ⎔ቃᛶࡢຍᕤᢏ⾡ࠊ ࡢ࢜ࣥὀධ࡞᪂つࡢᢏ⾡ᑟධࡀᚲせ࡛࠶ࡿࠋ 㕲㗰ᮦᩱ࣑ࣝࢽ࣒࢘ࡲࡓࡣ࣐ࢢࢿࢩ࣒࢘ྜ㔠࡞␗✀ ࢜ࣥὀධࡣ༙ᑟయ⏘ᴗࡢ୰࡛ࡣ㛗ࡃせ⣲ᢏ⾡ࡋ࡚ ᮦᩱ㛫ࡢ᥋ྜᢏ⾡ࡢ㛤Ⓨࡀồࡵࡽࢀ࡚࠸ࡿࠋࡲࡓࠊ⯟✵ᶵ ⏝࠸ࡽࢀ࡚࠸ࡿࠋ┠ⓗࡣ㺂SQ༙ᑟయ㡿ᇦࡢᙧᡂࡢࡓࡵࡢࢻ ⏘ᴗ࡛ࡣࠊ&)53 ࡀ㍍㔞ࡢษࡾᮐࡋ࡚ࢃࢀጞࡵࡓ ࡀࠊ〇㐀㸦ᡂᙧ㸧ࠊຍᕤᕤ⛬࠸ࡲࡔࡁ࡞ㄢ㢟ࢆṧࡋ࡚ ࠸ࡿࠋࡲࡓ⪏⇕ྜ㔠ࡸࢳࢱࣥྜ㔠ࡶ⯟✵ᶵ㒊ရࡋ࡚ከࡃ ࢃࢀ࡚࠸ࡿࡀࠊࡑࡢຍᕤࡣከࡃࡢ㛫࢚ࢿࣝࢠ࣮ࢆ ࣮ࣃࣥࢺὀධ㸪ࢹࣂࢫࡢ㟁Ẽ≉ᛶࡢ㧗⢭ᗘ㸦ࣛࣇࢱ ࣒ไᚚ㸪ࢻࢼ࣮άᛶ㸪ὀධḞ㝗పῶ㸧࡞ᵝࠎ࡛࠶ ࡿࠋᮦᩱຍᕤࡢᛂ⏝ࡢⓎ➃ࡣ㸪ཎᏊ⅔ࡢෆቨࡢᨺᑕ⥺ ㈝ࡸࡉࢀ࡚࠸ࡿࡢࡀ⌧≧࡛࠶ࡿࠋࡇࢀࡽࡢᮦᩱࡢຍᕤ⬟ ࡼࡿ⬤⪃࠼ࡽࢀࡿࠋ㏆ᖺ࡛ࡣ࣑࢜ࣥࣜࣥࢢ⨨ࡸ㞟 ⋡ࠊప⎔ቃ㈇Ⲵᛶࡢ㣕㌍ⓗ࡞ྥୖࡀᙉࡃồࡵࡽࢀ࡚࠸ࡿࠋ ᮰࢜ࣥࣅ࣮࣒ຍᕤ⨨࡞ࢹࣂࢫຍᕤࡢ㡿ᇦ࡛ࡶᚲ ୍᪉ࠊ〇ရࡋ࡚ࡢᛶ⬟ࢆྥୖࡉࡏࡿࡓࡵࠊሬ࣭⁐ᑕ࣭ 㡲ࡢᢏ⾡ࡋ࡚⏝㏵ࡣᣑࡋ࡚࠸ࡿࠋࡲࡓ㧗࢚ࢿࣝࢠ࣮ ࢥ࣮ࣝࢻࢫࣉ࣮ࣞ➼ࢆྵࡵࡓྛ✀⾲㠃ฎ⌮ࠊ࣐ࢡࣟ㺃ࢼ ࢜ࣥࡢᛂ⏝ࡋ࡚ࣛࢨࣇ࢛࣮ࢻᚋ᪉ᩓ㸦5%6㸧㸪ᙎᛶ ࣀᵓ㐀ࡢࡶ㔜せ࡞ㄢ㢟࡛࠶ࡿ㸬ࡉࡽྛ✀せ⣲ᢏ⾡㛫 ࡢᚭᗏࡋࡓ㐃ᦠ࣭㐃㙐ࡼࡾࠊᕷሙࢽ࣮ࢬᛂ࠼ࡿୖ࡛ᢏ ͊ ឡ▱ᕤᴗᏛ ᕤᏛ㒊㟁ẼᏛ⛉㸦㇏⏣ᕷ㸧 ឡ▱ᕤᴗᏛ ⥲ྜᢏ⾡◊✲ᡤ㸦㇏⏣ᕷ㸧 ㊴⢏Ꮚ᳨ฟἲ㸦(5'$㸧ࢆࡣࡌࡵࡍࡿࢹࣂࢫࡢᵓ㐀ホ ౯࣭ศᯒホ౯ࡀᣲࡆࡽࢀࡿ㸬 ឡ▱ᕤᴗᏛ⥲ྜᢏ⾡◊✲ᡤ◊✲ሗ࿌㸪➨ 16 愛知工業大学総合技術研究所研究報告，第 16 ྕ㸪2014 号，2014ᖺ 年 20 (a) 10ʅm (b) 10ʅm Figure 1 Cross-section TEM image of Si Figure 3 Heated surface of and Al-Mg Alloy(b) Si(a) Figure 2 Cross-section TEM image of Al-Mg Alloy ᖺ%OXHOࡽࡣ62,༙ᑟయ࢙࢘ࣁࡢస〇ࣉࣟࢭࢫ ࠾࠸࡚㸪ⷧ⭷άᛶᒙࡢ㞳ཬࡧ㌿㏦ᢏ⾡Ỉ⣲࢜ࣥὀ 㸬ᐇ㦂᪉ἲ ධࢆ⏝࠸ࡓ㹙㸯㹛ࡇࡣ༙ᑟయࣉࣟࢭࢫࡢᛂ⏝࠾࠸࡚㔜 せ࡞ᒎ㛤Ⅼ࡞ࡗࡓ㸬ࢩࣜࢥࣥᨭᣢᇶᯈぶỈᛶ㈞ࡾྜࢃ ḟୡ௦ࡢ㍺㏦⏝ᶵჾ⏝࠸ࡿࡇࡀ᭷ຊどࡉࢀ࡚࠸ࡿ ࡏࡉࢀࡓ㓟⭷࢜ࣥὀධᇶᯈࡽຍ⇕ฎ⌮ࡼࡾ▐ ㍍㔞ࡘ㧗๛ᛶ࡞⣲ᮦࢆࢱ࣮ࢤࢵࢺࡋࡓࠋ㔠ᒓᮦᩱࡋ ⷧ⭷ᒙࡀྲྀࡾฟࡉࢀࡿࡶࡢ࡛࠶ࡾࠊ㧗࠸⤖ᬗᛶࠊ㧗⢭ ࡚ࡣ࣑ࣝྜ㔠㸦$O0J0J㸧ࠊ࣐ࢢࢿࢩ࣒࢘ྜ㔠㸦$=㸹 ᗘࡘ┬㈨※㸦࢟ࣜࡋࢁࡣQP࣮࢜ࢲ㸧➼ࡢ≉ᚩࢆᣢࡘࠋ㧗 $O㸧ࠊࡑࡋ࡚ࢳࢱࣥࠋ」ྜᮦᩱࡋ࡚ࡣࠊ&)53ࠊ࠾ࡼࡧ 㞟✚㸪㧗㏿ࡘపᾘ㈝㟁ຊࢆᐇ⌧ࡍࡿ62,ᵓ㐀ࢹࣂࢫࡢ ࣮࢝࣎ࣥࢢࣛࣇࢺᯈࢆྲྀࡾୖࡆࡓࠋࢩࣜࢥࣥ➼༙ᑟయ స〇᭱㐺࡞ࣉࣟࢭࢫ࡞ࡗ࡚࠸ࡿࠋ ⤖ᬗᮦᩱ࠾࠸࡚㞳ࡀ㉳ࡁࡿ᮲௳ྠ➼ࡢ᮲௳㸦ὀධ࢚ ࡇࡢⷧ⭷ᙧᡂ࣓࢝ࢽࢬ࣒ࡢ㘽ࡣỈ⣲ࣈࣜࢫࢱࣜࣥࢢ⌧ ㇟࠶ࡾ㸪࢜ࣥὀධࡉࢀࡓỈ⣲ࡀຍ⇕ࡼࡾ┙≧✵Ὕ ࢿࣝࢠ࣮㸸NH9㸪ࢻ࣮ࢬ㔞㸸[FP㸫㸰㸧࡚Ỉ⣲ ࢜ࣥὀධࢆ⾜ࡗࡓࠋ ࢆᙧᡂࡋࠊ⾲㠃ࡽ୍ᐃࡢ῝ࡉࡢ㊥㞳࡛ࡑࢀࡽࡀ㐃⤖ࡋୖ ຍ⇕୰ࡢ⤒㐣ࢆほᐹࡍࡿࡓࡵຍ⇕ࢫࢸ࣮ࢪࢆഛࡋࡓ ᒙ㒊ࢆᘬࡁࡀࡍᡭἲ࡛࠶ࡿࠋࡶࡗࡥࡽ༙ᑟయ⤖ᬗ ගᏛ㢧ᚤ㙾ࢆ⏝࠸㸪❅⣲㞺ᅖẼ୰ࡑࡢሙຍ⇕ほᐹࢆ⾜࡞ࡗ 6L6,&➼㸧ࡢຍᕤ⏝ࡉࢀ>@ࠊ㔠ᒓ࣭」ྜᮦᩱ࡞ ࡓ㸬300Υ࡞࠸ࡋࡣ700Υࡲ࡛ຍ⇕ࡋ㸪ヨᩱ⾲㠃Ⓨ⏕ࡍࡿ ࡢᮦᩱࡢᛂ⏝ࡣ↓࠸ࠋࡇࡇ࡛ࡣࠊ㔠ᒓᮦᩱ࠾ࡼࡧ」ྜ ࣈࣜࢫࢱࣜࣥࢢ(㝯㉳)ཬࡧ㞳ࢆほᐹࡋࡓ㸬ຍ⇕ᚋヨᩱࡢ ᮦᩱࡢᛂ⏝ࡢྍྰࢆ᫂ࡽࡍࡃࠊᢏ⾡ᛂ⏝ࡢྍ⬟ᛶ ⾲㠃ࡣࠊSEM࠶ࡿ࠸ࡣSPMࢆ⏝࠸ヲ⣽࡞ᙧ≧ィ ࢆ⾜࡞ࡗ ࡢ᳨ドࡑࡢᇶ♏㈨ᩱࢆᚓࡿࡇࢆ┠ⓗࡋࡓࠋ ࡓ㸬ヨᩱෆ㒊ࡢᵓ㐀ࡣTEMࢆ⏝࠸ࡓ᩿㠃ほᐹࡽホ౯ࡍ ࡿ㸬 ࢜ࣥὀධ❧⬮ࡋࡓ㞴ຍᕤᛶᮦᩱࡢ㉸⢭ᐦ㞳ᢏ⾡ࡢ㛤Ⓨ イオン注入に立脚した難加工性材料の超精密剥離技術の開発 Figure 4 Cross sectional TEM image of ion implanted hard-to-process materials Figure 5 SEM surface image of Mg-Al Alloy(AZ31) and Cross-sectinonal TEM image 㸬ᐇ㦂⤖ᯝ 㸦)LJE㸧ࠋࡇࢀࡽ㞳➼ࡢ⌧㇟ࡢ᭷↓ࡢ⌮⏤ࢆ᥈ࡿࡓ ࡵࠊࡑࢀࡒࢀࡢᮦᩱࡢ࢜ࣥὀධᚋࡘຍ⇕๓ࡢヨᩱࡢ᩿ NH9 ࡢ࢚ࢿࣝࢠ࣮࡛Ỉ⣲࢜ࣥࢆὀධࡉࢀࡓヨᩱ࡛ 㠃ࢆ㏱㐣ᆺ㟁Ꮚ㢧ᚤ㙾ࡼࡗ࡚ࡑࡢᵓ㐀ࢆホ౯ࡋࡓ ࡣ⾲㠃ࡽ ȣP ᙅࡢ῝ࡉ࢜ࣥὀධḞ㝗ᒙࢆᙧᡂࡍ )LJࠋ㞳࠾ࡼࡧࣈࣜࢫࢱࣜࣥࢢࡀⓎ⏕ࡋࡓᮦᩱࡢඹ ࡿ㸬࢜ࣥὀධᚋࡢ 6L ࡢḞ㝗ᒙࡢᵝᏊࢆᅗ ♧ࡍ㸬 $O0J ㏻ⅬࡣࠊỈ⣲⃰ᗘࡀࣆ࣮ࢡ࡞ࡿ῝ࡉ࡛⣲ᮦࡢ༢⤖ᬗᵓ㐀 ྜ㔠ࡢ᩿㠃ࡣ )LJ ࡀ♧ࡍࡼ࠺Ḟ㝗ᒙࡀ⤖ᬗࡢ┦ᵓ㐀 ࡀᏑᅾࡋ࡚࠸ࡿࡇ࡛࠶ࡗࡓࠋ$O0J ྜ㔠ࡣࠊᅽᘏᯒ ࡢ୰ほᐹࡉࢀࡿ㸬࢜ࣥὀධᚋヨᩱࢆຍ⇕ࡋࡓ⤖ᯝࠊ ฟࡼࡾ⾲㠃ᖹ⾜࡞ከᒙࡢ⤖ᬗ┦ᵓ㐀ࡀᙧᡂࡉࢀ࡚࠾ ࣑࣭࣐ࣝࢢࢿࢩ࣒࢘㸦$O0J0J㸧ࡢྜ㔠࡛ࡣࠊ)LJD ࡾࠊࡇࢀࡽࡢᏑᅾࡀ࢞ࢫࢆྵࡴ✵ஈࡢ⭾ᙇ㞳➼ࡢ⌧ ♧ࡍࢩࣜࢥࣥྠᵝ⾲㠃┤ᚄ ȣP ⛬ᗘࡢᒁᡤⓗ⭾ ㇟ࢆᑟࡁࡸࡍࡃࡍࡿࡇࡀࢃࡗࡓࠋ ࡽࡳ㸦ࣈࣜࢫࢱࣜࣥࢢ㸧ࡸ㞳ࡢⓎ⏕ࡀほᐹࡉࢀࡓ 21 ឡ▱ᕤᴗᏛ⥲ྜᢏ⾡◊✲ᡤ◊✲ሗ࿌㸪➨ 16 愛知工業大学総合技術研究所研究報告，第 16 ྕ㸪2014 号，2014 ᖺ 年 22 Figure 6 Cross-sectional TEM image of Al-Mg Alloy(a) and CFRP(b) ୍᪉ 0J ྜ㔠㸦$=㸹$O)LJ㸧࡛ࡣࠊຍ⇕୰ࡢࣈࣜ ㏱㐣ᆺ㟁Ꮚ㢧ᚤ㙾ἲࡼࡾホ౯ࡋࡓࡇࢁࠊᅽᘏࡢᯒฟ ࢫࢱࣜࣥࢢࡣ᫂░࡛ࠊຍ⇕ᚋࡣ㞳ࡪࡼࡾ᪉ྥᛶࢆ ࡼࡾᙧᡂࡋࡓᛮࢃࢀࡿ⤖ᬗ┦ࡢᏑᅾࡀࠊ㞳ࡢⓎ⏕ࢆ ᣢࡘ͆࠼ࡄࢀ͇ᙧ≧ࡀᙧᡂࡉࢀࡓࠋࡼࡾၥ㢟࡞ࡢࡣࠊΥ ᑟ࠸࡚࠸ࡿࡇࡀࢃࡗࡓࠋࡇࡢࡇࡽࠊከ⤖ᬗࢆయ ຍ⇕࡛⾲㠃ࡣⓑⰍྜ≀ᒙ࡛そࢃࢀ࡚࠾ࡾࠊ┠ⓗࡣ␗ ࡍࡿ㔠ᒓᮦᩱ➼࠾࠸࡚ࡶࠊ᮲௳ࡼࡗ࡚Ỉ⣲࢜ࣥὀ ࡞ࡿ⤖ᯝ࡞ࡗࡓࡇ࡛࠶ࡿࠋ࣐ࢢࢿࢩ࣒࢘ྜ㔠 &)53 ධࢆ⏝࠸ࡓ㞳ᢏ⾡ࡀ㌿⏝ྍ⬟࡛࠶ࡿࡇࢆ♧ࡍࡇࡀ ࡢ㏱㐣ᆺ㟁Ꮚ㢧ᚤ㙾ࡼࡿᵓ㐀ゎᯒࡽ㸪࢜ࣥὀධᚋࡇ ࡛ࡁࡓࠋ ࢀࡽࡢヨᩱࡢ᩿㠃ᵓ㐀ࡣ㸪᫂☜࡞࢜ࣥ↷ᑕ㡿ᇦࡀ⌧ࢀ ࡞࠸ࡇࡀࢃࡗࡓ㸬ࡇࢀࡽヨᩱ࠾࠸࡚ࡣ㸪≀⌮ⓗ࡞స ㅰ㎡ ⏝ࡼࡾࡴࡋࢁᏛⓗస⏝ࡀ⌧㇟ࡢせᅉ࡞ࡗ࡚࠸ࡿࡇ ᮏ◊✲ࡢ୍㒊ࡣࠊᖹᡂ 22 ᖺᗘᩥ㒊⛉Ꮫ┬⚾❧Ꮫᡓ␎ⓗ◊ ࡀࢃࡗࡓ㸬AlࠊTiࠊC-ࢢࣛࣇࢺࠊCFRP ࢆࡑࡢሙ ✲ᇶ┙ᙧᡂᨭ⤒㈝㸦ࣉࣟࢪ࢙ࢡࢺ S1001033㸧࡞ࡽࡧබ ຍ⇕ࢆ⾜ࡗࡓࡀࠊ⾲㠃ୖࡢኚࡣ࠶ࡿࡶࡢࡢࠊࣈࣜࢫࢱࣜ ┈㈈ᅋἲே⛉Ꮫᢏ⾡ὶ㈈ᅋ▱ࡢᣐⅬ࠶࠸ࡕ㔜Ⅼ◊✲ࣉࣟ ࣥࢢ࠶ࡿ࠸ࡣ㞳⌧㇟ࡣ☜ㄆ࡛ࡁ࡞ࡗࡓࠋAl-Mg ྜ㔠 ࢪ࢙ࢡࢺࡢຓࢆཷࡅ࡚⾜ࢃࢀࡓࠋ࢜ࣥὀධᐇ㦂ࡢ୍㒊 ࡢὀධ๓ࡢ᩿㠃 TEM ീࡽࡣ⾲㠃Ỉᖹᒙᵓ㐀ࡀᙧᡂ ࡣබ┈㈈ᅋἲேⱝ⊃‴࢚ࢿࣝࢠ࣮࡚⾜ࢃࢀࡓ㸬ヨᩱస〇 ࡉࢀ࡚࠸ࡓ㸬」ྜᮦᩱ࡛࠶ࡿ CFRP ࡣࣞࢪࣥ(࢚࣏࢟ࢩᶞ ࡢ୍㒊ࡣឡ▱⏘ᴗ⛉Ꮫᢏ⾡⥲ྜࢭࣥࢱ࣮࡚ᐇࡋࡓ㸬ࡲ ⬡)Ⅳ⣲⧄⥔ࡼࡿ」ྜᮦᩱ࡛࠶ࡿ㸬ෆ㒊ྵࡲࢀࡿⅣ ࡓࡈ༠ຊ㡬࠸ࡓᮏᏛᕤᏛ㒊㟁ẼᏛ⛉㟁ᏊሗᕤᏛᑓᨷᡤᒓ ⣲⧄⥔ࡣ┤ᚄ 5μm ࡛࠶ࡿ(ᅗ 6(b)ཧ↷)㸬ඖ᮶᭷ᶵ≀ࡢᶞ ࡢᏛ⏕⣬㠃ࢆࡾ࡚ឤㅰࡍࡿࠋᮏ◊✲ࡣࠊᖹᡂ 22 ᖺᗘᩥ ⬡࡛࠶ࡿࣞࢪࣥෆὀධࡉࢀࡓ࢜ࣥࡢ㊧ࡣ☜ㄆ࡛ࡁ 㒊⛉Ꮫ┬⚾❧Ꮫᡓ␎ⓗ◊✲ᇶ┙ᙧᡂᨭ⤒㈝㸦ࣉࣟࢪ࢙ ࡎ㸪ࡲࡓᩘ༑ nm ࡢ࣮࢜ࢲ࣮ࡢᨵ㉁ࢆ⾜࡞࠺࢜ࣥὀධࡢ ࢡࢺ S1001033㸧࡞ࡽࡧබ┈㈈ᅋἲே⛉Ꮫᢏ⾡ὶ㈈ᅋ▱ ຍᕤࡣᩘ࣑ࢡ࣮ࣟࣥ࢜ࢲࡢ⾲㠃⢒ᗘࡸෆ㒊ᵓ㐀ࢆᣢࡘ ࡢᣐⅬ㔜Ⅼ◊✲ࣉࣟࢪ࢙ࢡࢺ㸦㞴ຍᕤᛶᮦᩱࡢ㉸⢭ᐦ࣭㧗 CFRP ࡣ⌧≧࡛ࡣ㐺࡛࠶ࡗࡓ㸬 ⬟⋡ຍᕤᢏ⾡ࡢ㛤Ⓨ㸧ࡢຓࢆཷࡅ࡚⾜ࢃࢀࡓࠋ୍㒊ࡢ ࢜ࣥὀධࡣබ┈㈈ᅋἲேⱝ⊃‴࢚ࢿࣝࢠ࣮◊✲ࢭࣥࢱ࣮ ࡚ᐇࡋࡓࠋヨᩱస〇࡞ࡽࡧホ౯ࡈ༠ຊ㡬࠸ࡓᮏᏛᏛ 4㸬 ⤖ゝ Ỉ⣲࢜ࣥὀධࢆ⏝࠸࡚༙ᑟయⷧ⭷ࢆᙧᡂࡍࡿᡭἲ ⏕ࠊ⏣ᐿὯẶ㸦⌧㸸ࢧ࢚࢝⌮◊ᕤᴗᰴᘧ♫㸧⣬㠃ࢆ ࡾ࡚ឤㅰࡍࡿࠋ ࢆࠊ᪂ࡓࢳࢱࣥࠊ࣑ࣝ࡞㔠ᒓᮦᩱࠊ&)53 ➼Ⅳ⣲⣔ 」ྜᮦᩱ㌿⏝ࢆヨࡳࡓࠋࢩࣜࢥࣥ➼ࡢ༙ᑟయ⤖ᬗྠࡌ ཧ⪃ᩥ⊩ ᮲௳ࢆ⏝࠸ࡓࡇࢁࠊ࣑࣭࣐ࣝࢢࢿࢩ࣒࢘ྜ㔠࠾࠸࡚ [1] M. Bruel, Electronics letters 31 (1995) 1201, ⾲㠃㞳⌧㇟ࢆぢฟࡍࡇࡀ࡛ࡁࡓࠋヨᩱࡢ᩿㠃ᵓ㐀ࢆ [2] Q.Y. Tong, R.W. Bower, MRS Bulletin 23 (1998) 40
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